The ceramic End Effector could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
The ceramic spare parts we produced can meet the strict requirements of parts for semiconductor equipment with its features of wear resistance, corrosion resistance,insulation.
The ceramic raw materials we usually use are zirconia, 95% ~ 99.9% alumina, silicon nitride and etc.
Inner Diameter: 1.25mm, 1.57mm, 1.78mm, 2.0mm, 2.5mm, 3.0mm Tolerance of inner diameter can reach to ±0.001mm.
It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics etc.
As structural components, most industrial ceramics require precision machining, especially those with complex shapes and high precision requirements. Due to shrinkage and deformation of the ceramics during sintering, it needs to be precision machined as dimension tolerance and surface finish are difficult to meet requirements after that. In addition to achieving dimension accuracy and improving surface finish, it can also eliminate surface defects. Therefore, precision machining of ceramics is an indispensable and critical process.